Intellevation on Stand G22

Real-Time Refractive Index Compensation Drives Higher Yield Coating Processes

Intellevation has introduced powerful new algorithms into its world-leading FilmMaker and FilmDirector optical monitoring software suites enabling the real-time compensation for run-to-run refractive index variations. This is especially useful when depositing materials like TiOx that have many oxide states and whose refractive index can vary to a significant level from run-to-run. This will have a major impact on coating process yield and product performance.

 

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