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 The system includes the modular designed electron beam evaporator e-beamM, the filament power supply beam Well and the evaporation controller beam Treck . The high voltage power supply beamPower is soon to follow.
The special benefit for the user is the modular design of the evaporator. The e-beamM is assembled with three main parts according to the customers’ choice. e-beamM is available with single pot and multi pot crucible and a power up to 12kW. The e-beamM can be reassembled with another crucible, in this case only the base plate and the crucible have to be modified, all the other modules remain unaffected. There is no need to calibrate the new electron beam. e-beamM is compatible with most existing power supplies and evaporation controllers
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